JPS6134686Y2 - - Google Patents
Info
- Publication number
- JPS6134686Y2 JPS6134686Y2 JP19727481U JP19727481U JPS6134686Y2 JP S6134686 Y2 JPS6134686 Y2 JP S6134686Y2 JP 19727481 U JP19727481 U JP 19727481U JP 19727481 U JP19727481 U JP 19727481U JP S6134686 Y2 JPS6134686 Y2 JP S6134686Y2
- Authority
- JP
- Japan
- Prior art keywords
- ionization chamber
- sample
- heater
- ionization
- ion source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010438 heat treatment Methods 0.000 claims description 12
- 229910052751 metal Inorganic materials 0.000 claims description 10
- 239000002184 metal Substances 0.000 claims description 10
- 238000000151 deposition Methods 0.000 claims description 2
- 230000005684 electric field Effects 0.000 claims description 2
- 150000002500 ions Chemical class 0.000 description 14
- 238000000034 method Methods 0.000 description 11
- 238000000451 chemical ionisation Methods 0.000 description 5
- 239000000356 contaminant Substances 0.000 description 5
- 239000011888 foil Substances 0.000 description 5
- 238000004458 analytical method Methods 0.000 description 3
- 238000009413 insulation Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 238000004949 mass spectrometry Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000003795 desorption Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000000752 ionisation method Methods 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000001172 regenerating effect Effects 0.000 description 1
Landscapes
- Electron Tubes For Measurement (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19727481U JPS58101458U (ja) | 1981-12-29 | 1981-12-29 | 質量分析装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19727481U JPS58101458U (ja) | 1981-12-29 | 1981-12-29 | 質量分析装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58101458U JPS58101458U (ja) | 1983-07-09 |
| JPS6134686Y2 true JPS6134686Y2 (en]) | 1986-10-08 |
Family
ID=30110486
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19727481U Granted JPS58101458U (ja) | 1981-12-29 | 1981-12-29 | 質量分析装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58101458U (en]) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6066174A (ja) * | 1983-09-21 | 1985-04-16 | Hitachi Ltd | 試料分析装置 |
| JPS61140046A (ja) * | 1984-12-12 | 1986-06-27 | Fumio Watanabe | 質量分析型残留ガス分析計における加熱脱ガス方法 |
| JP6045467B2 (ja) * | 2013-09-27 | 2016-12-14 | 日本電子株式会社 | 質量分析装置 |
-
1981
- 1981-12-29 JP JP19727481U patent/JPS58101458U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58101458U (ja) | 1983-07-09 |
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